2018 IEEE International conference on semiconductor electronics (ICSE) synthesis, properties and humidity detection of anodized Nb2O5 films

Rozina Abdul Rani, Ahmad Sabirin Zoolfakar, Mohamad Fauzee Mohamad Ryeeshyam, Naiwa Ezira Ahmed Azhar, Mohamad Hafiz Mamat, Salman Alrokavan, Haseeb A. Khan, Mohamad Rusop Mahmood

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Synthesis of nanoporous network Nb2O5has been conducted via anodization technique in the flouride-organic based solution. The structure morphology and the properties of the nanoporous films were characterized using field emission scanning electron microscopy (FESEM). In this research, a humidity sensor based on 1.5 micrometer thick nanoporous Nb2O5was developed and their performance was evaluated under 40% to 90% relative humidity at room temperature and different bias voltages of 2, 5 and 8 V. The highest relative sensitivity achieved was 156.2 for humidity sensor operated at bias voltage of 5 V.

LanguageEnglish
Title of host publication2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages89-92
Number of pages4
Volume2018-August
ISBN (Electronic)9781538652831
DOIs
Publication statusPublished - Oct 3 2018
Event13th IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Kuala Lumpur, Malaysia
Duration: Aug 15 2018Aug 17 2018

Other

Other13th IEEE International Conference on Semiconductor Electronics, ICSE 2018
CountryMalaysia
CityKuala Lumpur
Period8/15/188/17/18

Fingerprint

Humidity sensors
Bias voltage
Atmospheric humidity
Electronic equipment
Semiconductor materials
Field emission
Scanning electron microscopy
Temperature

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Rani, R. A., Zoolfakar, A. S., Ryeeshyam, M. F. M., Azhar, N. E. A., Mamat, M. H., Alrokavan, S., ... Mahmood, M. R. (2018). 2018 IEEE International conference on semiconductor electronics (ICSE) synthesis, properties and humidity detection of anodized Nb2O5 films. In 2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings (Vol. 2018-August, pp. 89-92). [8481330] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMELEC.2018.8481330

2018 IEEE International conference on semiconductor electronics (ICSE) synthesis, properties and humidity detection of anodized Nb2O5 films. / Rani, Rozina Abdul; Zoolfakar, Ahmad Sabirin; Ryeeshyam, Mohamad Fauzee Mohamad; Azhar, Naiwa Ezira Ahmed; Mamat, Mohamad Hafiz; Alrokavan, Salman; Khan, Haseeb A.; Mahmood, Mohamad Rusop.

2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings. Vol. 2018-August Institute of Electrical and Electronics Engineers Inc., 2018. p. 89-92 8481330.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rani, RA, Zoolfakar, AS, Ryeeshyam, MFM, Azhar, NEA, Mamat, MH, Alrokavan, S, Khan, HA & Mahmood, MR 2018, 2018 IEEE International conference on semiconductor electronics (ICSE) synthesis, properties and humidity detection of anodized Nb2O5 films. in 2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings. vol. 2018-August, 8481330, Institute of Electrical and Electronics Engineers Inc., pp. 89-92, 13th IEEE International Conference on Semiconductor Electronics, ICSE 2018, Kuala Lumpur, Malaysia, 8/15/18. https://doi.org/10.1109/SMELEC.2018.8481330
Rani RA, Zoolfakar AS, Ryeeshyam MFM, Azhar NEA, Mamat MH, Alrokavan S et al. 2018 IEEE International conference on semiconductor electronics (ICSE) synthesis, properties and humidity detection of anodized Nb2O5 films. In 2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings. Vol. 2018-August. Institute of Electrical and Electronics Engineers Inc. 2018. p. 89-92. 8481330 https://doi.org/10.1109/SMELEC.2018.8481330
Rani, Rozina Abdul ; Zoolfakar, Ahmad Sabirin ; Ryeeshyam, Mohamad Fauzee Mohamad ; Azhar, Naiwa Ezira Ahmed ; Mamat, Mohamad Hafiz ; Alrokavan, Salman ; Khan, Haseeb A. ; Mahmood, Mohamad Rusop. / 2018 IEEE International conference on semiconductor electronics (ICSE) synthesis, properties and humidity detection of anodized Nb2O5 films. 2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings. Vol. 2018-August Institute of Electrical and Electronics Engineers Inc., 2018. pp. 89-92
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