Fabrication of integrated solid state electrode for extended gate-FET pH sensor

Research output: Contribution to journalArticle

Abstract

To realize the miniaturization of an extended gate field effect transistor (EGFET) based sensor, an all solid state phase electrodes are needed. This paper presents the facile fabrication of an integrated solid state electrode (ISSE) consisting a solid state silver/silver chloride (Ag/AgCl) reference electrode (RE) and ZnO nanostructures sensing electrode (SE) on a single 2 × 2 cm2 indium tin oxide (ITO) substrate. The RE and SE was fabricated by thermal evaporation (TE) and simple immersion process respectively. The ISSE was then tested by applying it to an EGFET pH sensor setup and compared with commercialized Ag/AgCl RE; and it was found that the sensor sensitivity for both electrodes are comparable (commercial RE: 52.4 mV pH-1, ISSE: 53.4 mV pH-1).

LanguageEnglish
Article number016419
JournalMaterials Research Express
Volume6
Issue number1
DOIs
Publication statusPublished - Jan 1 2019

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pH sensors
Field effect transistors
Fabrication
Electrodes
Sensors
Gates (transistor)
Silver
Thermal evaporation
Tin oxides
Indium
Nanostructures

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Surfaces, Coatings and Films
  • Polymers and Plastics
  • Metals and Alloys

Cite this

Fabrication of integrated solid state electrode for extended gate-FET pH sensor. / Rosli, Aimi Bazilah; Awang, Zaiki; Shariffudin, Shafinaz Sobihana; Herman, Sukreen Hana.

In: Materials Research Express, Vol. 6, No. 1, 016419, 01.01.2019.

Research output: Contribution to journalArticle

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